mass flow sensor / thermal / gas / miniature
-40 ... +150 °C, max. 50 m/s | MFS02
Vnation JSC
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Technology:
mass, thermal
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Applications:
gas
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Other characteristics:
miniature
nnovative Sensor Technology has developed a new MFS02 micro flow sensor that utilizes thin film technology to layer platinum micro heaters and temperature sensors on an ultra sensitive polymer membrane. The MFS02 is capable of measuring the thermal mass flow of gases in a range from 0.001 to 2m/s (up to 50m/s), and has a chip temperature range of -40 to +150?C.
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